MEMS Sensors with Chemically Selective Coatings of Ionic Liquids

ER-1464

Objective

ER-1464 Project Graphic

Picture of ionic-liquid coated microcantilevers.

Military training and testing can often lead to disturbances in and around stream and riparian areas as well as emissions of regulated air pollutants. To detect air- and water-quality parameters, there is a need for innovative, miniaturized, accurate, and robust sensors that have long lifetimes in the field and can withstand environmental extremes and possible disruption due to military activities. Ionic liquid-coated microcantilever transducers have shown promise in developing miniaturized, highly sensitive, and selective micro-electro-mechanical systems (MEMS). Microcantilevers respond to stimuli that affect the micro-mechanical characteristics of the transducer in such a way that the resulting change can be measured using optical, electronic, or other means. Microcantilevers have been used to detect molecular adsorbates with masses in the femtogram (10-15) and, more recently, attogram (10-18) range. Compared to more common gravimetric sensors, microcantilever transducers offer mass sensitivity that is better by many orders of magnitude. Microcantilever transducers are equally functional in contact with gases and liquids. In addition, transducers based on the MEMS platform are fabricated using cost-efficient integral technologies.

The objectives of this SERDP Exploratory Development (SEED) project were to (1) show that ionic liquids can be used to increase the sensitivity of microcantilever sensors toward selected air-quality parameters, such as concentrations of nitrogen and sulfur oxides, ozone, and fine particles; (2) show that specific ionic liquids can be used as microcantilever coatings to enhance selectivity of one analyte over the others; (3) demonstrate the potential use of microcantilever sensors coated with ionic liquids to monitor water-quality parameters; and (4) demonstrate operation of the sensing device at extreme environmental conditions.

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Technical Approach

Researchers reviewed the ionic-liquid literature to identify cations and anions that have chemical affinity with analytes relevant to environmental parameters. Microcantilever transducers of special geometries were then designed and fabricated. The sensing capabilities of the microcantilevers were evaluated for various analyte mixtures toward selected air-quality parameters. Microcantilever sensors coated with ionic liquids also were used to monitor water-quality parameters, such as metal ions and soluble organics. In addition, their use as sensor devices at extreme environmental conditions (e.g., high temperatures) was demonstrated.

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Benefits

The results of this project revealed that ionic-liquid coatings generate a desirable response for microcantilevers and may be suitable for use in detection of vapor and aqueous analytes. Coatings are also stable in various environments, including atmospheric conditions and high temperature vapors. The biggest practical appeal of microcantilever sensors is that they can provide sensitive and rapid detection of chemical and biochemical species directly because of changes in intrinsic stresses or mass-loading effects associated with bulk (absorption) or interfacial (adsorption-desportion) processes. Their performance makes them good candidates for MEMS-based sensor applications to detect and quantify both air- and water-quality parameters that are relevant to military activities. (SEED Project Completed - 2007)

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Project Documents

Points of Contact

Principal Investigator

Dr. Costas Tsouris

Oak Ridge National Lab

Phone: 865-241-3246

Fax: 865-241-4829

Program Manager

Environmental Restoration

SERDP and ESTCP

Project Documents

Document Types

  • Fact Sheet - Brief project summary with links to related documents and points of contact.
  • Final Report - Comprehensive report for every completed SERDP and ESTCP project that contains all technical results.
  • Cost & Performance Report - Overview of ESTCP demonstration activities, results, and conclusions, standardized to facilitate implementation decisions.
  • Technical Report - Additional interim reports, laboratory reports, demonstration reports, and technology survey reports.
  • Guidance - Instructional information on technical topics such as protocols and user’s guides.
  • Workshop Report - Summary of workshop discussion and findings.
  • Multimedia - On demand videos, animations, and webcasts highlighting featured initiatives or technologies.
  • Model/Software - Computer programs and applications available for download.
  • Database - Digitally organized collection of data available to search and access.